1) Roles: shape maintenance, cohesion, adhesion
2) Types: silicone, epoxy, urethane, acryl, etc
1) Roles: heat transfer, electrical conduction/insulation
2) Types: ceramic, metal, carbonaceous materials, etc.
- High thermal conductivity
- Uniform temperature maintained at the edge of the wafer during high-temperature processing
- Semiconductor yield ↑
- Thermal conductivity/electrical properties
- High heat and cold resistance
- Uniform temperature maintained at the edge of the wafer during low-temperature processing
- Semiconductor yield ↑
- Productivity improved through removal of air bubbles
- Process improvement (semi-automation)
- Improved work standards and work efficiency