Patent certificate for a device that attaches cooling sheets to focusing rings for semiconductor device manufacturing equipment

Patent certificate for heat dissipation pad composition for 3W semiconductor equipment

Patent certificate for a vacuum chamber for attaching cooling sheets to focusing rings for semiconductor device manufacturing

Patent certificate for a device that attaches cooling sheets to focusing rings for semiconductor device manufacturing

Patent certificate for a silicone parts packaging container

Patent certificate for gasket manufacturing device and manufacturing method

Patent certificate for a gasket for chamber lid assembly of semiconductor manufacturing equipment

Design registration certificate for support for attaching film to semiconductor components

Design registration certificate for lower support for semiconductor component film attachment

Design registration certificate for support fixing pins for attaching films to semiconductor components

Design registration certificate for focusing ring centering jig