- It is installed in areas where noise damage due to RF PLASMA is feared.
- It is installed in areas where signal interference occurs due to electromagnetic waves from semiconductor / LED / LCD equipment.
- It is also used to improve contact between parts and for grounding.
- SUS : Medium shielding rate, low unit price
- Elgiloy : Strong against arcing
- Hastelloy : Strong corrosion resistance
- Beryllium Copper(Becu) : High shielding rate / Ni, Sn plating possible
- Titanium : Mainly AI plating, connection between AI parts, ground connection